Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems

Patent

James DeYoung, JB McClain and Stephen Gross

2006

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Title: Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems
Creators: James DeYoung (Inventor) - Micell Technologies;Micell Integrated Systems
JB McClain (Inventor)
Stephen Gross (Inventor) - Department of Chemistry
Additional links: Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
Identifiers: 991005929740302656
Academic Unit: Chemistry and Biochemistry
Language: English
Resource Type: Patent