- Title
- Method for Cleaning of Microelectronic Structures with Aqueous Carbon Dioxide Systems
- Creators
- James DeYoung (Inventor) - Micell Technologies;Micell Integrated SystemsJB McClain (Inventor)Stephen Gross (Inventor) - Department of ChemistryJoseph M. Desimone (Inventor) - University of North Carolina at Chapel Hill;North Carolina State University;Department of Chemistry;Department of Chemical Engineering;Department of Chemistry;Department of Chemical Engineering;Department of Chemical Engineering;Kenan Laboratories of Chemistry
- Additional links
- Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
- Identifiers
- 991005930935502656
- Academic Unit
- Chemistry and Biochemistry
- Language
- English
- Resource Type
- Patent
Patent
Method for Cleaning of Microelectronic Structures with Aqueous Carbon Dioxide Systems
2003
Metrics
5 Record Views