Method for the Control of Contamination Following Carbon Dioxide Cleaning of Microelectronic Structures

Patent

James DeYoung, JB McClain and Stephen Gross

2003

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Title: Method for the Control of Contamination Following Carbon Dioxide Cleaning of Microelectronic Structures
Creators: James DeYoung (Inventor) - Micell Technologies;Micell Integrated Systems
JB McClain (Inventor)
Stephen Gross (Inventor) - Department of Chemistry
Additional links: Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
Identifiers: 991005930954902656
Academic Unit: Chemistry and Biochemistry
Language: English
Resource Type: Patent