- Title
- Method of Coating Microelectronic Substrates
- Creators
- James DeYoung (Inventor) - Micell Technologies;Micell Integrated SystemsJB McClain (Inventor)Stephen Gross (Inventor) - Department of ChemistryD Taylor (Inventor)Mark Wagner (Inventor) - Micell Integrated Systems;Micell TechnologiesD Brainard (Inventor)
- Additional links
- Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
- Identifiers
- 991005930970402656
- Academic Unit
- Chemistry and Biochemistry
- Language
- English
- Resource Type
- Patent
Patent
Method of Coating Microelectronic Substrates
2009
Metrics
5 Record Views