- Title
- Method of treating microelectronic substrates
- Creators
- James DeYoung (Inventor) - Micell Technologies;Micell Integrated SystemsJB McClain (Inventor)Stephen Gross (Inventor) - Department of ChemistryD Taylor (Inventor)Mark Wagner (Inventor) - Micell Integrated Systems;Micell TechnologiesD Brainard (Inventor)
- Additional links
- Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
- Identifiers
- 991005929498702656
- Academic Unit
- Chemistry and Biochemistry
- Language
- English
- Resource Type
- Patent
Patent
Method of treating microelectronic substrates
2006
Metrics
4 Record Views