Methods and Compositions for Etch Cleaning Microelectronic Substrates

Patent

James DeYoung, Stephen Gross, Mark Wagner and JB McClain

2003

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Title: Methods and Compositions for Etch Cleaning Microelectronic Substrates
Creators: James DeYoung (Inventor) - Micell Technologies;Micell Integrated Systems
Stephen Gross (Inventor) - Department of Chemistry
Mark Wagner (Inventor) - Micell Integrated Systems;Micell Technologies
JB McClain (Inventor)
Additional links: Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
Identifiers: 991005929672902656
Academic Unit: Chemistry and Biochemistry
Language: English
Resource Type: Patent