- Title
- Processes for Cleaning and Drying Microelectronic Structures Using Liquid or Supercritical Carbon Dioxide
- Creators
- James DeYoung (Inventor) - Micell Technologies;Micell Integrated SystemsJB McClain (Inventor)Stephen Gross (Inventor) - Department of Chemistry
- Additional links
- Nuttall, Alfred L.; Ren, Tianying; Gillespie, Peter; Grosh, Karl; de Boer, Egbert
- Identifiers
- 991005930226502656
- Academic Unit
- Chemistry and Biochemistry
- Language
- English
- Resource Type
- Patent
Patent
Processes for Cleaning and Drying Microelectronic Structures Using Liquid or Supercritical Carbon Dioxide
2003
Metrics
4 Record Views